On-chip Optofluidic Ring Resonator Sensor for Micro-scale Gas Chromatography
نویسندگان
چکیده
The design, fabrication and preliminary performance assessment of a new vapor sensor comprising a microfabricated optofluidic ring resonator (μOFRR) and its application to microscale gas chromatographic (μGC) detection of volatile organic compounds (VOC) are presented. The μOFRR combines vapor sensing and fluidic transport functions in a micro-fabricated whispering gallery mode (WGM) resonator. The device also integrates on-chip fluidic-interconnection and fiber-optic probe alignment features. We demonstrate sub-second, sub-ng VOC detection and also couple the μOFRR to an upstream μGC column for rapid analysis of a simple VOC mixture.
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